ALS130H - Big Linear Motion Performance in a Little Package
04 July 2008
The ALS130H, with its sub-nanometre resolution, superior bi-directional repeatability, and exceptional low-velocity performance, is the unparalleled solution for high performance test, measurement, inspection, and other demanding applications.
Linear Motor Drive
Unlike many stages that utilise a side-drive lead screw, the ALS130H employs a center-driven, non-cogging linear motor as the driving element. Since the linear motor is a direct-drive device, there is no backlash, windup, or "stiction" that is normally associated with a lead screw or ball-screw drive.
The linear motor drive also offers the advantage of higher speeds and accelerations. The compact yet powerful linear motor drives the ALS130H to a peak unloaded acceleration of 1 g and a maximum velocity of 300 mm/s. The result is a high-performance stage with outstanding throughput that significantly outperforms comparable high-accuracy screw-driven stages.
Exceptional Resolution
For alignment applications, outstanding step-to-step resolution is critical. The ALS130H meets this demand with a resolution of 0.5 nm when coupled with Aerotech controls.
The direct-drive linear motor allows the ALS130H to make precise, small resolution steps. This is particularly important in alignment applications where step accuracy is critical. Furthermore, the linear motor and high resolution encoder system also provides excellent in-position stability.
Superior Geometry
Aerotech's ultra-stiff construction and compact two-piece design result in a stage with unmatched geometrical tolerances. As a result, straightness and flatness for the standard stage is <±2µm over the entire travel.
Smooth Travel
Designed for smooth, vibration-free motion, the ALS130H utilises precision anti-cage creep cross-roller bearings for outstanding smoothness of motion. Since neither the bearing system nor the drive system utilise any re-circulating elements, the ALS130H exhibits the outstanding ripple-free motion required for scanning and inspection applications.
Designed for Long Life
Like all stages in the Aerotech product family, the ALS130H was designed for outstanding long-term performance. Both the linear motor and linear encoder are non-contact devices - they not only exhibit long-life, but are totally maintenance free. A moving magnet track design eliminates the need for cable management, further improving long-term reliability.
Precision Alignment
ALS130H series stages are easily configured as XY assemblies. Options include precision orthogonality alignment to five arc seconds and available vertical axis solutions.
